JPH072609Y2 - 真空成膜装置 - Google Patents

真空成膜装置

Info

Publication number
JPH072609Y2
JPH072609Y2 JP1989115462U JP11546289U JPH072609Y2 JP H072609 Y2 JPH072609 Y2 JP H072609Y2 JP 1989115462 U JP1989115462 U JP 1989115462U JP 11546289 U JP11546289 U JP 11546289U JP H072609 Y2 JPH072609 Y2 JP H072609Y2
Authority
JP
Japan
Prior art keywords
substrate
chamber
film thickness
film
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989115462U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353556U (en]
Inventor
佳興 横山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1989115462U priority Critical patent/JPH072609Y2/ja
Publication of JPH0353556U publication Critical patent/JPH0353556U/ja
Application granted granted Critical
Publication of JPH072609Y2 publication Critical patent/JPH072609Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1989115462U 1989-09-29 1989-09-29 真空成膜装置 Expired - Fee Related JPH072609Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989115462U JPH072609Y2 (ja) 1989-09-29 1989-09-29 真空成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989115462U JPH072609Y2 (ja) 1989-09-29 1989-09-29 真空成膜装置

Publications (2)

Publication Number Publication Date
JPH0353556U JPH0353556U (en]) 1991-05-23
JPH072609Y2 true JPH072609Y2 (ja) 1995-01-25

Family

ID=31663790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989115462U Expired - Fee Related JPH072609Y2 (ja) 1989-09-29 1989-09-29 真空成膜装置

Country Status (1)

Country Link
JP (1) JPH072609Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007084926A (ja) * 2005-08-24 2007-04-05 Brother Ind Ltd 膜形成装置および膜形成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5874338U (ja) * 1981-11-13 1983-05-19 帝人株式会社 薄膜形成装置

Also Published As

Publication number Publication date
JPH0353556U (en]) 1991-05-23

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